JPH0451140U - - Google Patents
Info
- Publication number
- JPH0451140U JPH0451140U JP9295990U JP9295990U JPH0451140U JP H0451140 U JPH0451140 U JP H0451140U JP 9295990 U JP9295990 U JP 9295990U JP 9295990 U JP9295990 U JP 9295990U JP H0451140 U JPH0451140 U JP H0451140U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- elastic body
- protective sheet
- processed side
- roller
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001681 protective effect Effects 0.000 claims description 3
- 239000002390 adhesive tape Substances 0.000 claims description 2
- 238000005096 rolling process Methods 0.000 claims 1
Landscapes
- Dicing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9295990U JPH0451140U (en]) | 1990-09-04 | 1990-09-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9295990U JPH0451140U (en]) | 1990-09-04 | 1990-09-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0451140U true JPH0451140U (en]) | 1992-04-30 |
Family
ID=31829813
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9295990U Pending JPH0451140U (en]) | 1990-09-04 | 1990-09-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0451140U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016117290A (ja) * | 2016-02-29 | 2016-06-30 | 三星ダイヤモンド工業株式会社 | 脆性材料基板の分断装置 |
-
1990
- 1990-09-04 JP JP9295990U patent/JPH0451140U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016117290A (ja) * | 2016-02-29 | 2016-06-30 | 三星ダイヤモンド工業株式会社 | 脆性材料基板の分断装置 |